Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113234 | UV assisted silylation for porous low-k film sealing | Bo Xie, Alexandros T. Demos, Vu Ngoc Tran Nguyen, Kelvin Chan, Kang Sub Yim +1 more | 2018-10-30 |
| 10109520 | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | Sree Rangasai V. Kesapragada, Kevin Moraes, Srinivas Guggilla, Mehul Naik, David Thompson +6 more | 2018-10-23 |
| 10049927 | Seam-healing method upon supra-atmospheric process in diffusion promoting ambient | Bencherki Mebarki, Sean S. Kang, Keith Tatseun Wong, Mehul Naik, Ellie Yieh +1 more | 2018-08-14 |
| 10008448 | Dielectric/metal barrier integration to prevent copper diffusion | Mehul Naik, Yong Cao, Mei-Yee Shek | 2018-06-26 |