Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10047430 | Self-ionized and inductively-coupled plasma for sputtering and resputtering | Peijun Ding, Zheng Xu, Daniel C. Lubben, Suraj Rengarajan, Michael Miller +7 more | 2018-08-14 |
| 10014179 | Methods for forming cobalt-copper selective fill for an interconnect | Tae Hong Ha, Xianmin Tang, Joung Joo Lee | 2018-07-03 |