Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9984911 | Electrostatic chuck design for high temperature RF applications | Ryan Edwin Hanson, Vijay D. Parkhe, John C. Forster, Keith A. Miller | 2018-05-29 |
| 9888528 | Substrate support with multiple heating zones | Tomoharu Matsushita, Jallepally Ravi, Cheng-Hsiung Tsai, Aravind Kamath, Xiaoxiong Yuan | 2018-02-06 |