Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134615 | Substrate support with improved RF return | Cheng-Hsiung Tsai, Jallepally Ravi, Tomoharu Matsushita, Yu Chang | 2018-11-20 |
| 9888528 | Substrate support with multiple heating zones | Tomoharu Matsushita, Jallepally Ravi, Cheng-Hsiung Tsai, Xiaoxiong Yuan, Manjunatha Koppa | 2018-02-06 |