Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134615 | Substrate support with improved RF return | Aravind Kamath, Cheng-Hsiung Tsai, Jallepally Ravi, Yu Chang | 2018-11-20 |
| 9888528 | Substrate support with multiple heating zones | Jallepally Ravi, Cheng-Hsiung Tsai, Aravind Kamath, Xiaoxiong Yuan, Manjunatha Koppa | 2018-02-06 |