Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134615 | Substrate support with improved RF return | Aravind Kamath, Cheng-Hsiung Tsai, Jallepally Ravi, Tomoharu Matsushita | 2018-11-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134615 | Substrate support with improved RF return | Aravind Kamath, Cheng-Hsiung Tsai, Jallepally Ravi, Tomoharu Matsushita | 2018-11-20 |