Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049861 | Inductively coupled RF plasma source with magnetic confinement and Faraday shielding | Victor M. Benveniste, Costel Biloiu | 2018-08-14 |
| 9988711 | Apparatus and method for multilayer deposition | Alexandre Likhanskii, William Davis Lee | 2018-06-05 |
| 9922795 | High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture | Bon-Woong Koo, Alexandre Likhanskii, Anthony Renau | 2018-03-20 |
| 9865430 | Boron implanting using a co-gas | Bon-Woong Koo, Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Timothy J. Miller +3 more | 2018-01-09 |