Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134568 | RF ion source with dynamic volume control | Yong-Seok Hwang, Kyong-Jae Chung | 2018-11-20 |
| 9978554 | Dual cathode ion source | Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro, Michael D. Johnson +2 more | 2018-05-22 |
| 9922795 | High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture | Alexandre Likhanskii, Svetlana B. Radovanov, Anthony Renau | 2018-03-20 |
| 9899193 | RF ion source with dynamic volume control | Yong-Seok Hwang, Kyong-Jae Chung | 2018-02-20 |
| 9887067 | Boron implanting using a co-gas | Vikram M. Bhosle, John A. Frontiero | 2018-02-06 |
| 9865430 | Boron implanting using a co-gas | Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Timothy J. Miller, Svetlana B. Radovanov +3 more | 2018-01-09 |
| 9859098 | Temperature controlled ion source | Scott C. Holden, Brant S. Binns, Richard M. White, Kenneth L. Starks, Eric R. Cobb | 2018-01-02 |