Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10081861 | Selective processing of a workpiece | Morgan Evans, Daniel Distaso, Stanislav S. Todorov, Mark R. Amato, Jillian Reno | 2018-09-25 |
| 9988711 | Apparatus and method for multilayer deposition | Alexandre Likhanskii, Svetlana B. Radovanov | 2018-06-05 |
| 9978556 | Parallelizing electrostatic acceleration/deceleration optical element | Frank Sinclair | 2018-05-22 |
| 9960060 | Platen assembly | — | 2018-05-01 |
| 9899188 | Selective processing of a workpiece using ion beam implantation and workpiece rotation | Mark R. Amato, Jillian Reno | 2018-02-20 |