Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049861 | Inductively coupled RF plasma source with magnetic confinement and Faraday shielding | Svetlana B. Radovanov, Costel Biloiu | 2018-08-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049861 | Inductively coupled RF plasma source with magnetic confinement and Faraday shielding | Svetlana B. Radovanov, Costel Biloiu | 2018-08-14 |