Issued Patents 2011
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003520 | Air gap structure having protective metal silicide pads on a metal feature | Griselda Bonilla, Satyanarayana V. Nitta, Takeshi Nogami, Shom Ponoth, David L. Rath +1 more | 2011-08-23 |
| 7998864 | Noble metal cap for interconnect structures | Chih-Chao Yang, Fenton R. McFeely | 2011-08-16 |
| 7993817 | Structure with self aligned resist layer on an insulating surface and method of making same | Elbert E. Huang, Robert D. Miller | 2011-08-09 |
| 7977032 | Method to create region specific exposure in a layer | Christos D. Dimitrakopoulos, Vincent J. McGahay, Satyanarayana V. Nitta, Kevin S. Petrarca, Shom Ponoth +1 more | 2011-07-12 |
| 7968949 | Contact forming method and related semiconductor device | Louis L. Hsu, Chih-Chao Yang | 2011-06-28 |
| 7964966 | Via gouged interconnect structure and method of fabricating same | Chih-Chao Yang, Theodorus E. Standaert | 2011-06-21 |
| 7956463 | Large grain size conductive structure for narrow interconnect openings | Chih-Chao Yang, Takeshi Nogami, Stephen M. Rossnagel | 2011-06-07 |
| 7955971 | Hybrid metallic wire and methods of fabricating same | Chih-Chao Yang, Kaushik Chanda, Baozhen Li | 2011-06-07 |
| 7951714 | High aspect ratio electroplated metal feature and method | Keith Kwong Hon Wong, Chih-Chao Yang, Haining Yang | 2011-05-31 |
| 7951708 | Copper interconnect structure with amorphous tantalum iridium diffusion barrier | Patrick W. DeHaven, Philip L. Flaitz, Takeshi Nogami, Stephen M. Rossnagel, Chih-Chao Yang | 2011-05-31 |
| 7943480 | Sub-lithographic dimensioned air gap formation and related structure | Nicholas C. M. Fuller, David V. Horak, Elbert E. Huang, Wai-Kin Li, Anthony D. Lisi +2 more | 2011-05-17 |
| 7928569 | Redundant barrier structure for interconnect and wiring applications, design structure and method of manufacture | Chih-Chao Yang | 2011-04-19 |
| 7892940 | Device and methodology for reducing effective dielectric constant in semiconductor devices | Matthew E. Colburn, Edward C. Cooney, III, Timothy J. Dalton, John A. Fitzsimmons, Jeffrey P. Gambino +10 more | 2011-02-22 |
| 7892648 | SiCOH dielectric material with improved toughness and improved Si-C bonding | Stephen M. Gates, Alfred Grill, Michael Lane, Robert D. Miller, Deborah A. Neumayer +1 more | 2011-02-22 |
| 7888741 | Structures with improved interfacial strength of SiCOH dielectrics and method for preparing the same | Alfred Grill, Vishnubhai V. Patel, Darryl D. Restaino | 2011-02-15 |
| 7884477 | Air gap structure having protective metal silicide pads on a metal feature | Griselda Bonilla, Satyanarayana V. Nitta, Takeshi Nogami, Shom Ponoth, David L. Rath +1 more | 2011-02-08 |
| 7863150 | Method to generate airgaps with a template first scheme and a self aligned blockout mask | Matthew E. Colburn, Satya V. Nitta, Sampath Purushothaman, Shom Ponth | 2011-01-04 |