Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058176 | Methods of patterning insulating layers using etching techniques that compensate for etch rate variations | Wan Jae Park, Kaushik A. Kumar, Joseph Edward Linville, Ravi Prakash Srivastava, Hermann Wendt | 2011-11-15 |
| 7943480 | Sub-lithographic dimensioned air gap formation and related structure | Daniel C. Edelstein, Nicholas C. M. Fuller, David V. Horak, Elbert E. Huang, Wai-Kin Li +2 more | 2011-05-17 |
| 7939446 | Process for reversing tone of patterns on integerated circuit and structural process for nanoscale fabrication | Lawrence A. Clevenger, Maxime Darnon, Satya V. Nitta | 2011-05-10 |