Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062971 | Dual damascene process | Philipp Riess, Erdem Kaltalioglu | 2011-11-22 |
| 8058176 | Methods of patterning insulating layers using etching techniques that compensate for etch rate variations | Wan Jae Park, Kaushik A. Kumar, Joseph Edward Linville, Anthony D. Lisi, Ravi Prakash Srivastava | 2011-11-15 |
| 8013364 | Semiconductor devices and structures thereof | Markus Naujok, Alois Gutmann, Muhammed Shafi Pallachalil | 2011-09-06 |
| 7906426 | Method of controlled low-k via etch for Cu interconnections | Wuping Liu, Johnny Widodo, Teck Jung Tang, Jing Hui Li, Han Wah Ng +1 more | 2011-03-15 |
| 7883987 | Semiconductor devices and methods of manufacture thereof | Armin Tilke, Frank Huebinger | 2011-02-08 |
| 7871902 | Crack stop trenches | Erdem Kaltalioglu | 2011-01-18 |