Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058176 | Methods of patterning insulating layers using etching techniques that compensate for etch rate variations | Wan Jae Park, Joseph Edward Linville, Anthony D. Lisi, Ravi Prakash Srivastava, Hermann Wendt | 2011-11-15 |
| 8030157 | Liner protection in deep trench etching | Habib Hichri, Ahmad D. Katnani, Narender Rana, Richard S. Wise, Hakeem B. S. Akinmade-Yusuff | 2011-10-04 |
| 8008209 | Thermal gradient control of high aspect ratio etching and deposition processes | Michael Sievers, Andres Fernando Munoz, Richard S. Wise | 2011-08-30 |
| 7888252 | Self-aligned contact | Johnathan E. Faltermeier, Stephan Grunow, Kangguo Cheng, Kevin S. Petrarca, Lawrence A. Clevenger +2 more | 2011-02-15 |
| 7879717 | Polycarbosilane buried etch stops in interconnect structures | Elbert E. Huang, Kelly Malone, Dirk Pfeiffer, Muthumanickam Sankarapandian, Christy S. Tyberg | 2011-02-01 |