Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030202 | Temporary etchable liner for forming air gap | David V. Horak, Charles W. Koburger, III, Shom Ponoth | 2011-10-04 |
| 7993817 | Structure with self aligned resist layer on an insulating surface and method of making same | Daniel C. Edelstein, Robert D. Miller | 2011-08-09 |
| 7989291 | Anisotropic stress generation by stress-generating liners having a sublithographic width | Lawrence A. Clevenger, Bruce B. Doris, Sampath Purushothaman, Carl Radens | 2011-08-02 |
| 7951705 | Multilayered cap barrier in microelectronic interconnect structures | Jeffrey Hedrick | 2011-05-31 |
| 7948051 | Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same | Matthew E. Colburn, Stephen M. Gates, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman +1 more | 2011-05-24 |
| 7943480 | Sub-lithographic dimensioned air gap formation and related structure | Daniel C. Edelstein, Nicholas C. M. Fuller, David V. Horak, Wai-Kin Li, Anthony D. Lisi +2 more | 2011-05-17 |
| 7892940 | Device and methodology for reducing effective dielectric constant in semiconductor devices | Daniel C. Edelstein, Matthew E. Colburn, Edward C. Cooney, III, Timothy J. Dalton, John A. Fitzsimmons +10 more | 2011-02-22 |
| 7879717 | Polycarbosilane buried etch stops in interconnect structures | Kaushik A. Kumar, Kelly Malone, Dirk Pfeiffer, Muthumanickam Sankarapandian, Christy S. Tyberg | 2011-02-01 |