Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7955968 | Pseudo hybrid structure for low K interconnect integration | Pak K. Leung, Terry G. Sparks, David V. Horak | 2011-06-07 |
| 7948051 | Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same | Matthew E. Colburn, Jeffrey Hedrick, Elbert E. Huang, Satyanarayana V. Nitta, Sampath Purushothaman +1 more | 2011-05-24 |
| 7948083 | Reliable BEOL integration process with direct CMP of porous SiCOH dielectric | Christos D. Dimitrakopoulos, Vincent J. McGahay, Sanjay C. Mehta | 2011-05-24 |
| 7915180 | SiCOH film preparation using precursors with built-in porogen functionality | Alfred Grill, Robert D. Miller, Deborah A. Neumayer, Son V. Nguyen | 2011-03-29 |
| 7892648 | SiCOH dielectric material with improved toughness and improved Si-C bonding | Daniel C. Edelstein, Alfred Grill, Michael Lane, Robert D. Miller, Deborah A. Neumayer +1 more | 2011-02-22 |
| 7863749 | Electronic structures utilizing etch resistant boron and phosphorus materials and methods to form same | Robert D. Miller | 2011-01-04 |