Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7948083 | Reliable BEOL integration process with direct CMP of porous SiCOH dielectric | Christos D. Dimitrakopoulos, Stephen M. Gates, Vincent J. McGahay | 2011-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7948083 | Reliable BEOL integration process with direct CMP of porous SiCOH dielectric | Christos D. Dimitrakopoulos, Stephen M. Gates, Vincent J. McGahay | 2011-05-24 |