Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977032 | Method to create region specific exposure in a layer | Daniel C. Edelstein, Vincent J. McGahay, Satyanarayana V. Nitta, Kevin S. Petrarca, Shom Ponoth +1 more | 2011-07-12 |
| 7948083 | Reliable BEOL integration process with direct CMP of porous SiCOH dielectric | Stephen M. Gates, Vincent J. McGahay, Sanjay C. Mehta | 2011-05-24 |