Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7915180 | SiCOH film preparation using precursors with built-in porogen functionality | Stephen M. Gates, Alfred Grill, Robert D. Miller, Son V. Nguyen | 2011-03-29 |
| 7892648 | SiCOH dielectric material with improved toughness and improved Si-C bonding | Daniel C. Edelstein, Stephen M. Gates, Alfred Grill, Michael Lane, Robert D. Miller +1 more | 2011-02-22 |