Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084825 | Trilayer resist scheme for gate etching applications | Timothy J. Dalton, Ying Zhang | 2011-12-27 |
| 8049335 | System and method for plasma induced modification and improvement of critical dimension uniformity | Timothy J. Dalton, Ronald Della Guardia | 2011-11-01 |
| 7960096 | Sublithographic patterning method incorporating a self-aligned single mask process | David W. Abraham, Steven E. Steen, Francois Pagette | 2011-06-14 |
| 7943480 | Sub-lithographic dimensioned air gap formation and related structure | Daniel C. Edelstein, David V. Horak, Elbert E. Huang, Wai-Kin Li, Anthony D. Lisi +2 more | 2011-05-17 |
| 7935637 | Resist stripping methods using backfilling material layer | Sivananda K. Kanakasabapathy, Ying Zhang | 2011-05-03 |
| 7927995 | Adopting feature of buried electrically conductive layer in dielectrics for electrical anti-fuse application | Chih-Chao Yang, Lawrence A. Clevenger, Timothy J. Dalton, Louis C. Hsu | 2011-04-19 |
| 7914970 | Mixed lithography with dual resist and a single pattern transfer | Michael A. Guillorn, Balasubramanian S. Pranatharthi Haran, Jyotica V. Patel | 2011-03-29 |