Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049335 | System and method for plasma induced modification and improvement of critical dimension uniformity | Timothy J. Dalton, Nicholas C. M. Fuller | 2011-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049335 | System and method for plasma induced modification and improvement of critical dimension uniformity | Timothy J. Dalton, Nicholas C. M. Fuller | 2011-11-01 |