Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8018061 | Integrated circuit hard mask processing system | Michael Beck, John A. Fitzsimmons | 2011-09-13 |
| 7906426 | Method of controlled low-k via etch for Cu interconnections | Johnny Widodo, Teck Jung Tang, Jing Hui Li, Han Wah Ng, Larry Clevenger +1 more | 2011-03-15 |