Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034710 | Bilayer metal capping layer for interconnect applications | Chih-Chao Yang | 2011-10-11 |
| 7939446 | Process for reversing tone of patterns on integerated circuit and structural process for nanoscale fabrication | Lawrence A. Clevenger, Maxime Darnon, Anthony D. Lisi | 2011-05-10 |
| 7863150 | Method to generate airgaps with a template first scheme and a self aligned blockout mask | Matthew E. Colburn, Daniel C. Edelstein, Sampath Purushothaman, Shom Ponth | 2011-01-04 |