Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7863150 | Method to generate airgaps with a template first scheme and a self aligned blockout mask | Matthew E. Colburn, Daniel C. Edelstein, Satya V. Nitta, Sampath Purushothaman | 2011-01-04 |