Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998880 | Low k dielectric CVD film formation process with in-situ imbedded nanolayers to improve mechanical properties | Son V. Nguyen, Sarah L. Lane, Eric G. Liniger, Kensaku Ida | 2011-08-16 |
| 7910484 | Method for preventing backside defects in dielectric layers formed on semiconductor substrates | Chester T. Dziobkowski, Thomas Houghton, Emily R. Kinser, Yun-Yu Wang | 2011-03-22 |
| 7888741 | Structures with improved interfacial strength of SiCOH dielectrics and method for preparing the same | Daniel C. Edelstein, Alfred Grill, Vishnubhai V. Patel | 2011-02-15 |