Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910484 | Method for preventing backside defects in dielectric layers formed on semiconductor substrates | Thomas Houghton, Emily R. Kinser, Darryl D. Restaino, Yun-Yu Wang | 2011-03-22 |