Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998880 | Low k dielectric CVD film formation process with in-situ imbedded nanolayers to improve mechanical properties | Son V. Nguyen, Sarah L. Lane, Kensaku Ida, Darryl D. Restaino | 2011-08-16 |