Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026166 | Interconnect structures comprising capping layers with low dielectric constants and methods of making the same | Tien-Jen Cheng, Lawrence A. Clevenger, Stephan Grunow, Chao-Kun Hu, Roger A. Quon +5 more | 2011-09-27 |
| 8003520 | Air gap structure having protective metal silicide pads on a metal feature | Daniel C. Edelstein, Satyanarayana V. Nitta, Takeshi Nogami, Shom Ponoth, David L. Rath +1 more | 2011-08-23 |
| 7884477 | Air gap structure having protective metal silicide pads on a metal feature | Daniel C. Edelstein, Satyanarayana V. Nitta, Takeshi Nogami, Shom Ponoth, David L. Rath +1 more | 2011-02-08 |