Issued Patents 2002
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485359 | Platen arrangement for a chemical-mechanical planarization apparatus | Shijian Li, Fred C. Redeker, John M. White | 2002-11-26 |
| 6474712 | Gripper for supporting substrate in a vertical orientation | Boris Govzman, Michael Sugarman, Anwar Husain | 2002-11-05 |
| 6447374 | Chemical mechanical planarization system | Phillip R. Sommer, Paul B. Butterfield | 2002-09-10 |
| 6413873 | System for chemical mechanical planarization | Shijian Li, John M. White, Lawrence Rosenberg, Martin Scales, Ramin Emami +1 more | 2002-07-02 |
| 6412503 | Magnetically coupled substrate roller | Alexander Lerner | 2002-07-02 |
| 6406359 | Apparatus for transferring semiconductor substrates using an input module | Brian J. Brown, Anwar Husain, Michael Sugarman | 2002-06-18 |
| 6399501 | Method and apparatus for detecting polishing endpoint with optical monitoring | Boguslaw A. Swedek, Nils Johansson | 2002-06-04 |
| 6390908 | Determining when to replace a retaining ring used in substrate polishing operations | Hung Chih Chen, Steven M. Zuniga, Bret W. Adams, Kean Chew | 2002-05-21 |
| 6390904 | Retainers and non-abrasive liners used in chemical mechanical polishing | Allan Gleason, John Prince, Mohsen Salek, Syed H. Askari | 2002-05-21 |
| 6386955 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Steven M. Zuniga, Hung Chih Chen, Sen-Hou Ko | 2002-05-14 |
| 6383058 | Adaptive endpoint detection for chemical mechanical polishing | Boguslaw A. Swedek | 2002-05-07 |
| 6381021 | Method and apparatus for measuring reflectivity of deposited films | Sasson Somekh | 2002-04-30 |
| 6379231 | Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet | Lawrence Rosenberg, Sasson Somekh, John M. White | 2002-04-30 |
| 6368191 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Steven M. Zuniga, Hung Chih Chen, Kapila Wijekoon, Sen-Hou Ko | 2002-04-09 |
| 6348124 | Delivery of polishing agents in a wafer processing system | Matthew G. Garbett, Robert D. Tolles, John Hearne | 2002-02-19 |