Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454630 | Rotatable platen having a transparent window for a chemical mechanical polishing apparatus and method of making the same | — | 2002-09-24 |
| 6443823 | Carrier head with layer of conformable material for a chemical mechanical polishing system | Tsungan Cheng, John Prince | 2002-09-03 |
| 6371836 | Groove cleaning device for chemical-mechanical polishing | Brian J. Brown, James Nystrom, Doyle E. Bennett, Madhavi R. Chandrachood | 2002-04-16 |
| 6348124 | Delivery of polishing agents in a wafer processing system | Matthew G. Garbett, John Hearne, Manoocher Birang | 2002-02-19 |