Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432826 | Planarized Cu cleaning for reduced defects | Ramin Emami, Shijian Li, Sen-Hou Ko, Fred C. Redeker | 2002-08-13 |
| 6371836 | Groove cleaning device for chemical-mechanical polishing | Brian J. Brown, Robert D. Tolles, James Nystrom, Doyle E. Bennett | 2002-04-16 |