Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485359 | Platen arrangement for a chemical-mechanical planarization apparatus | Fred C. Redeker, John M. White, Manoocher Birang | 2002-11-26 |
| 6465051 | Method of operating high density plasma CVD reactor with combined inductive and capacitive coupling | Turgut Sahin, Fred C. Redeker, Romuald Nowak, Timothy Dyer, Derek R. Witty | 2002-10-15 |
| 6451697 | Method for abrasive-free metal CMP in passivation domain | Lizhong Sun, Fritz Redeker | 2002-09-17 |
| 6432826 | Planarized Cu cleaning for reduced defects | Ramin Emami, Sen-Hou Ko, Fred C. Redeker, Madhavi R. Chandrachood | 2002-08-13 |
| 6416823 | Deposition chamber and method for depositing low dielectric constant films | Yaxin Wang, Fred C. Redeker, Tetsuya Ishikawa, Alan W. Collins | 2002-07-09 |
| 6413873 | System for chemical mechanical planarization | John M. White, Lawrence Rosenberg, Martin Scales, Ramin Emami, James V. Tietz +1 more | 2002-07-02 |