Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465051 | Method of operating high density plasma CVD reactor with combined inductive and capacitive coupling | Turgut Sahin, Fred C. Redeker, Romuald Nowak, Shijian Li, Timothy Dyer | 2002-10-15 |
| 6413871 | Nitrogen treatment of polished halogen-doped silicon glass | Hichem M'Saad, Manoj Vellaikal, Lin Zhang, Yaxin Wang | 2002-07-02 |