Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468927 | Method of depositing a nitrogen-doped FSG layer | Wen-Feng Ma, Zhuang Li | 2002-10-22 |
| 6413871 | Nitrogen treatment of polished halogen-doped silicon glass | Hichem M'Saad, Derek R. Witty, Manoj Vellaikal, Yaxin Wang | 2002-07-02 |