Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413871 | Nitrogen treatment of polished halogen-doped silicon glass | Hichem M'Saad, Derek R. Witty, Lin Zhang, Yaxin Wang | 2002-07-02 |
| 6410457 | Method for improving barrier layer adhesion to HDP-FSG thin films | Hichem M'Saad, Dana Tribula, Farhad Moghadam, Sameer Desai | 2002-06-25 |