Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413871 | Nitrogen treatment of polished halogen-doped silicon glass | Derek R. Witty, Manoj Vellaikal, Lin Zhang, Yaxin Wang | 2002-07-02 |
| 6410457 | Method for improving barrier layer adhesion to HDP-FSG thin films | Dana Tribula, Manoj Vellaikal, Farhad Moghadam, Sameer Desai | 2002-06-25 |
| 6399489 | Barrier layer deposition using HDP-CVD | Seon-Mee Cho, Dana Tribula | 2002-06-04 |