Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486082 | CVD plasma assisted lower dielectric constant sicoh film | Peter Wai-Man Lee, Chi-I Lang, Dian Sugiarto, Chen-An Chen, Li-Qun Xia +2 more | 2002-11-26 |
| 6399489 | Barrier layer deposition using HDP-CVD | Hichem M'Saad, Dana Tribula | 2002-06-04 |