Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486082 | CVD plasma assisted lower dielectric constant sicoh film | Seon-Mee Cho, Peter Wai-Man Lee, Chi-I Lang, Chen-An Chen, Li-Qun Xia +2 more | 2002-11-26 |
| 6395092 | Apparatus for depositing high deposition rate halogen-doped silicon oxide layer | Judy H. Huang, David Cheung | 2002-05-28 |