Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486082 | CVD plasma assisted lower dielectric constant sicoh film | Seon-Mee Cho, Peter Wai-Man Lee, Chi-I Lang, Dian Sugiarto, Li-Qun Xia +2 more | 2002-11-26 |
| 6387207 | Integration of remote plasma generator with semiconductor processing chamber | Karthik Janakiraman, Kelly Fong, Paul Le, Rong Pan, Shankar Venkataraman | 2002-05-14 |
| 6379492 | Corrosion resistant coating | Won Bae Bang, Shankar Venkataraman, Ajay Bhatnagar | 2002-04-30 |
| 6358327 | Method for endpoint detection using throttle valve position | Himanshu Pokharna, West M. Burghardt, Reuban Richmonds | 2002-03-19 |
| 6346481 | Method of reducing pitting of a coated heater | Won Bae Bang | 2002-02-12 |