Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495233 | Apparatus for distributing gases in a chemical vapor deposition system | Inna Shmurun, Scott A. Hendrickson, Gwendolyn D. Jones, Son T. Nguyen, I-Chun Liu | 2002-12-17 |
| 6486082 | CVD plasma assisted lower dielectric constant sicoh film | Seon-Mee Cho, Peter Wai-Man Lee, Chi-I Lang, Dian Sugiarto, Chen-An Chen +2 more | 2002-11-26 |
| 6413583 | Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound | Farhad Moghadam, David Cheung, Ellie Yieh, Li-Qun Xia, Wai-Fan Yau +4 more | 2002-07-02 |
| 6387207 | Integration of remote plasma generator with semiconductor processing chamber | Karthik Janakiraman, Kelly Fong, Chen-An Chen, Paul Le, Rong Pan | 2002-05-14 |
| 6379492 | Corrosion resistant coating | Won Bae Bang, Chen-An Chen, Ajay Bhatnagar | 2002-04-30 |
| 6374831 | Accelerated plasma clean | Shankar N. Chandran, Scott A. Hendrickson, Gwendolyn D. Jones, Ellie Yieh | 2002-04-23 |