Issued Patents 2002
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500773 | Method of depositing organosilicate layers | Frederic Gaillard, Li-Qun Xia | 2002-12-31 |
| 6486082 | CVD plasma assisted lower dielectric constant sicoh film | Seon-Mee Cho, Peter Wai-Man Lee, Chi-I Lang, Dian Sugiarto, Chen-An Chen +2 more | 2002-11-26 |
| 6486061 | Post-deposition treatment to enhance properties of Si-O-C low K films | Li-Qun Xia, Frederic Gaillard, Tian-Hoe Lim | 2002-11-26 |
| 6472333 | Silicon carbide cap layers for low dielectric constant silicon oxide layers | Li-Qun Xia, Paul Fisher, Margaret Gotuaco, Frederic Gaillard | 2002-10-29 |
| 6465366 | Dual frequency plasma enhanced chemical vapor deposition of silicon carbide layers | Srinivas D. Nemani, Li-Qun Xia | 2002-10-15 |
| 6465372 | Surface treatment of C-doped SiO2 film to enhance film stability during O2 ashing | Li-Qun Xia, Tian-Hoe Lim, Frederic Gaillard | 2002-10-15 |
| 6426015 | Method of reducing undesired etching of insulation due to elevated boron concentrations | Li-Qun Xia, Francimar Campana | 2002-07-30 |
| 6413583 | Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound | Farhad Moghadam, David Cheung, Li-Qun Xia, Wai-Fan Yau, Chi-I Lang +4 more | 2002-07-02 |
| 6374831 | Accelerated plasma clean | Shankar N. Chandran, Scott A. Hendrickson, Gwendolyn D. Jones, Shankar Venkataraman | 2002-04-23 |
| 6360685 | Sub-atmospheric chemical vapor deposition system with dopant bypass | Li-Qun Xia | 2002-03-26 |
| 6352591 | Methods and apparatus for shallow trench isolation | Li-Qun Xia, Srinivas D. Nemani | 2002-03-05 |
| 6347636 | Methods and apparatus for gettering fluorine from chamber material surfaces | Li-Qun Xia, Visweswaren Sivaramakrishnan, Srinivas D. Nemani, Gary Fong | 2002-02-19 |
| 6348099 | Methods and apparatus for depositing premetal dielectric layer at sub-atmospheric and high temperature conditions | Li-Qun Xia, Srinivas D. Nemani | 2002-02-19 |