Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472333 | Silicon carbide cap layers for low dielectric constant silicon oxide layers | Li-Qun Xia, Paul Fisher, Frederic Gaillard, Ellie Yieh | 2002-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472333 | Silicon carbide cap layers for low dielectric constant silicon oxide layers | Li-Qun Xia, Paul Fisher, Frederic Gaillard, Ellie Yieh | 2002-10-29 |