Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500773 | Method of depositing organosilicate layers | Li-Qun Xia, Ellie Yieh | 2002-12-31 |
| 6486061 | Post-deposition treatment to enhance properties of Si-O-C low K films | Li-Qun Xia, Ellie Yieh, Tian-Hoe Lim | 2002-11-26 |
| 6472333 | Silicon carbide cap layers for low dielectric constant silicon oxide layers | Li-Qun Xia, Paul Fisher, Margaret Gotuaco, Ellie Yieh | 2002-10-29 |
| 6465372 | Surface treatment of C-doped SiO2 film to enhance film stability during O2 ashing | Li-Qun Xia, Tian-Hoe Lim, Ellie Yieh | 2002-10-15 |
| 6413583 | Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound | Farhad Moghadam, David Cheung, Ellie Yieh, Li-Qun Xia, Wai-Fan Yau +4 more | 2002-07-02 |