Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472333 | Silicon carbide cap layers for low dielectric constant silicon oxide layers | Li-Qun Xia, Margaret Gotuaco, Frederic Gaillard, Ellie Yieh | 2002-10-29 |
| 6378378 | Wafer to measure pressure at a number of points in a process chamber | — | 2002-04-30 |