Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486061 | Post-deposition treatment to enhance properties of Si-O-C low K films | Li-Qun Xia, Frederic Gaillard, Ellie Yieh | 2002-11-26 |
| 6465372 | Surface treatment of C-doped SiO2 film to enhance film stability during O2 ashing | Li-Qun Xia, Frederic Gaillard, Ellie Yieh | 2002-10-15 |