Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448187 | Method of improving moisture resistance of low dielectric constant films | Wai-Fan Yau, Nasreen Chopra, Yung-Cheng Lu, Robert P. Mandal, Farhad Moghadam | 2002-09-10 |
| 6413583 | Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound | Farhad Moghadam, Ellie Yieh, Li-Qun Xia, Wai-Fan Yau, Chi-I Lang +4 more | 2002-07-02 |
| 6395092 | Apparatus for depositing high deposition rate halogen-doped silicon oxide layer | Dian Sugiarto, Judy H. Huang | 2002-05-28 |
| 6361707 | Apparatus and methods for upgraded substrate processing system with microwave plasma source | Tsutomu Tanaka, Mukul Kelkar, Kevin Fairbairn, Hari Ponnekanti | 2002-03-26 |
| 6358573 | Mixed frequency CVD process | Sebastien Raoux, Mandar Mudholkar, William Taylor, Mark Fodor, Judy H. Huang +2 more | 2002-03-19 |
| 6348725 | Plasma processes for depositing low dielectric constant films | Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2002-02-19 |
| 6340435 | Integrated low K dielectrics and etch stops | Claes Bjorkman, Min Melissa Yu, Hongquing Shan, Wai-Fan Yau, Kuowei Liu +7 more | 2002-01-22 |