Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6358573 | Mixed frequency CVD process | Sebastien Raoux, Mandar Mudholkar, William Taylor, Judy H. Huang, David Silvetti +2 more | 2002-03-19 |
| 6354241 | Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing | Tsutomu Tanaka, Chau Nguyen, Hari Ponnekanti, Kevin Fairbairn, Sebastien Raoux | 2002-03-12 |