Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451686 | Control of semiconductor device isolation properties through incorporation of fluorine in peteos films | Chris Ngai, Joel Glenn, Mei-Yee Shek | 2002-09-17 |
| 6436843 | System and method for coating substrates using ink jet technology | Henner Meinhold, Fred J. Chetcuti | 2002-08-20 |
| 6395092 | Apparatus for depositing high deposition rate halogen-doped silicon oxide layer | Dian Sugiarto, David Cheung | 2002-05-28 |
| 6358573 | Mixed frequency CVD process | Sebastien Raoux, Mandar Mudholkar, William Taylor, Mark Fodor, David Silvetti +2 more | 2002-03-19 |
| 6355571 | Method and apparatus for reducing copper oxidation and contamination in a semiconductor device | Christopher Dennis Bencher, Sudha Rathi, Christopher S. Ngai, Bok Hoen Kim | 2002-03-12 |
| 6340435 | Integrated low K dielectrics and etch stops | Claes Bjorkman, Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more | 2002-01-22 |