Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387819 | Method for etching low K dielectric layers | — | 2002-05-14 |
| 6340435 | Integrated low K dielectrics and etch stops | Claes Bjorkman, Hongquing Shan, David Cheung, Wai-Fan Yau, Kuowei Liu +7 more | 2002-01-22 |