Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6355571 | Method and apparatus for reducing copper oxidation and contamination in a semiconductor device | Judy H. Huang, Christopher Dennis Bencher, Sudha Rathi, Bok Hoen Kim | 2002-03-12 |